Invention Grant
- Patent Title: Shared data induced quality control for a chemical mechanical planarization process
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Application No.: US17663899Application Date: 2022-05-18
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Publication No.: US12205061B2Publication Date: 2025-01-21
- Inventor: Cesar Clavero , Vid Gopal , Ryan Clarke , Esmeralda Yitamben , Hieu Pham , Anupama Mallikarjunan , Rung-Je Yang , Shirley Lin , Hongjun Zhou , Joseph Rose , Krishna Murella , Lu Gan
- Applicant: Versum Materials US, LLC
- Applicant Address: US AZ Tempe
- Assignee: Versum Materials US, LLC
- Current Assignee: Versum Materials US, LLC
- Current Assignee Address: US AZ Tempe
- Agent James D. Wyninegar, Jr.
- Main IPC: G06Q10/0639
- IPC: G06Q10/0639 ; G06Q50/04

Abstract:
A method for developing or improving a process for producing a product from a material comprising steps of acquiring the composition for at least two slurries as raw material data (17) for the CMP based manufacturing process and its relevant parameters (2) by using a Data Collecting computer (9); physically performing specific method steps of a CMP process; measuring relevant parameters of the used slurries and the physically performed CMP process to determine the CMP process performance by using the Data Collecting computer (9); analyzing the measured data about the relevant parameters with a specific software performed on an Analyzing computer (11) by creating for the software and applying with it a predictive model using Machine Learning to understand the intercorrelation of the different parameters and using the results to improve the CMP process performance and the resulting product quality of the CMP based manufacturing process.
Public/Granted literature
- US20230325751A1 Shared Data Induced Quality Control For A Chemical Mechanical Planarization Process Public/Granted day:2023-10-12
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