Invention Grant
- Patent Title: Device and method for moving an object into a processing station, conveying system and processing apparatus
-
Application No.: US17621448Application Date: 2020-06-24
-
Publication No.: US12205838B2Publication Date: 2025-01-21
- Inventor: Rüdiger Pretscher
- Applicant: Atotech Deutschland GmbH
- Applicant Address: DE Berlin
- Assignee: Atotech Deutschland GmbH
- Current Assignee: Atotech Deutschland GmbH
- Current Assignee Address: DE Berlin
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Priority: EP19182628 20190626
- International Application: PCT/EP2020/067697 WO 20200624
- International Announcement: WO2020/260389 WO 20201230
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B05C3/132 ; H01L21/673 ; H01L21/677

Abstract:
A device for moving an object including a substrate through an open side of a processing station of a processing apparatus including a support, placeable at the processing station. The device includes a carrier, guided for movement relative to the support along a path predominantly directed in parallel to a reference axis in a reference co-ordinate system. The device includes a device for controlling movement of the carrier and driving the movement in an opposite direction along the path. The device includes a component for holding the object and a suspension mechanism with which the holding component is connected to the carrier. The suspension mechanism is arranged to guide movement of the holding component relative to the carrier along a holding component path. The device is arranged to drive the movement of the holding component along the holding component path. The holding component path is predominantly directed parallel to the reference axis.
Public/Granted literature
Information query
IPC分类: