Invention Grant
- Patent Title: Cell structure of silicon carbide MOSFET device, and power semiconductor device
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Application No.: US17781374Application Date: 2020-06-10
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Publication No.: US12205991B2Publication Date: 2025-01-21
- Inventor: Yafei Wang , Changwei Zheng , Shasha Jiao , Chengzhan Li , Haihui Luo
- Applicant: ZHUZHOU CRRC TIMES SEMICONDUCTOR CO., LTD.
- Applicant Address: CN Hunan
- Assignee: ZHUZHOU CRRC TIMES SEMICONDUCTOR CO., LTD.
- Current Assignee: ZHUZHOU CRRC TIMES SEMICONDUCTOR CO., LTD.
- Current Assignee Address: CN Hunan
- Priority: CN201911370082 20191226
- International Application: PCT/CN2020/095251 WO 20200610
- International Announcement: WO2021/128748 WO 20210701
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/06 ; H01L29/16 ; H01L29/66 ; H01L29/78

Abstract:
A cell structure of a silicon carbide MOSFET device, comprising a drift region (3) located on a substrate layer (2), a second conducting type well region (4) and a first JFET region (51) that are located in the drift region (3), an enhancement region located within a surface of the well region (4), a gate insulating layer (8) located on a first conducting type enhancement region (6), the well region (4) and the first JFET region (51) and being in contact therewith at the same time, a gate (9) located on the gate insulating layer, source metal (10) located on the enhancement region, Schottky metal (11) located on a second conducting type enhancement region (7) and the drift region (3), a second JFET region (52) located on a surface of the drift region (3) between the Schottky metals (11), and drain metal (12).
Public/Granted literature
- US20230006044A1 CELL STRUCTURE OF SILICON CARBIDE MOSFET DEVICE, AND POWER SEMICONDUCTOR DEVICE Public/Granted day:2023-01-05
Information query
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