Invention Grant
- Patent Title: Variable resistance non-volatile memory with a gate insulator film at a same height as a voltage application electrode
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Application No.: US17899898Application Date: 2022-08-31
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Publication No.: US12207480B2Publication Date: 2025-01-21
- Inventor: Tomoki Chiba , Daisaburo Takashima , Hidehiro Shiga
- Applicant: KIOXIA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: KIOXIA CORPORATION
- Current Assignee: KIOXIA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Kim & Stewart LLP
- Priority: JP2022-031640 20220302
- Main IPC: H10B63/00
- IPC: H10B63/00 ; G11C11/16 ; G11C13/00 ; H10B61/00 ; H10N70/00 ; H10N70/20

Abstract:
A variable resistance non-volatile memory includes a semiconductor substrate, a first electrode line extending in a first direction away from the semiconductor substrate, a second electrode line extending in the first direction parallel to the first electrode line, an insulating film between the first and second electrode lines, a variable resistance film formed on the first electrode line, a low electrical resistance layer formed on the variable resistance film and having a lower electrical resistance than the variable resistance film, a semiconductor film in contact with the low electrical resistance layer and the insulating film, and formed on opposite surfaces of the second electrode line, a gate insulator film extending in the first direction and in contact with the semiconductor film, and a voltage application electrode that extends in a second direction that crosses the first direction, and is in contact with the gate insulator film.
Public/Granted literature
- US20230284460A1 VARIABLE RESISTANCE NON-VOLATILE MEMORY Public/Granted day:2023-09-07
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