Invention Grant
- Patent Title: Solid body and multi-component arrangement
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Application No.: US17207894Application Date: 2021-03-22
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Publication No.: US12211702B2Publication Date: 2025-01-28
- Inventor: Wolfram Drescher , Marko David Swoboda , Ralf Rieske , Christian Beyer , Jan Richter
- Applicant: Siltectra GmbH
- Applicant Address: DE Dresden
- Assignee: Siltectra GmbH
- Current Assignee: Siltectra GmbH
- Current Assignee Address: DE Dresden
- Agency: Murphy, Bilak & Homiller, PLLC
- Priority: DE102016014821.7 20161212,DE102017010284.8 20171107
- Main IPC: H01L29/16
- IPC: H01L29/16 ; H01L21/02 ; H01L21/304 ; H01L21/324 ; H01L29/66

Abstract:
A solid body is disclosed. The solid body includes: a detachment plane in an interior space of the solid body, the detachment plane including laser radiation-induced modifications; and a region including layers and/or components. A multi-component arrangement is also disclosed. The multi-component arrangement includes: a solid-body layer including more than 50% SiC and modifications or modification components generating pressure tensions in a region of a first surface, the modifications being amorphized components of the solid-body layer, the modifications being spaced closer to the first surface than to a second surface opposite the first surface, the first surface being essentially level; and a metal layer on the first surface of the solid-body layer.
Public/Granted literature
- US20210225659A1 Solid Body and Multi-Component Arrangement Public/Granted day:2021-07-22
Information query
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