Invention Grant
- Patent Title: Reconfigurable mainframe with replaceable interface plate
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Application No.: US17322633Application Date: 2021-05-17
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Publication No.: US12211714B2Publication Date: 2025-01-28
- Inventor: Michael R. Rice
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa clara
- Agency: Lowenstein Sandler LLP
- Main IPC: G11C11/00
- IPC: G11C11/00 ; B65G47/90 ; G06F12/00 ; H01L21/67 ; H01L21/677 ; H01L21/687
Abstract:
A mainframe of a device fabrication system comprises a base and a plurality of facets on the base. Each facet of the plurality of facets comprises a frame. The mainframe further comprises a plurality of replaceable interface plates. Each replaceable interface plate of the plurality of replaceable interface plates is attached to a respective facet such that at most one replaceable interface plate is attached to each facet. At least one replaceable interface plate comprises one or more access ports. The mainframe further comprises a lid over the plurality of facets. The base, the lid and the plurality of facets with the attached plurality of replaceable interface plates together define an interior volume of the mainframe. The mainframe further comprises a robot arm in the interior volume.
Public/Granted literature
- US20210272825A1 RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE Public/Granted day:2021-09-02
Information query
