Invention Grant
- Patent Title: Alignment device and alignment method
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Application No.: US17049394Application Date: 2018-04-24
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Publication No.: US12211723B2Publication Date: 2025-01-28
- Inventor: Karl Heinz Priewasser , Yoshiyuki Harioka , Ken Ikehata , Yoshinori Kakinuma , Yosuke Ishimatsu , Ryouta Sawayama
- Applicant: DISCO HI-TEC EUROPE GMBH , TAKATORI CORPORATION
- Applicant Address: DE Kirchheim b. Munich; JP Kashihara
- Assignee: DISCO HI-TEC EUROPE GMBH,TAKATORI CORPORATION
- Current Assignee: DISCO HI-TEC EUROPE GMBH,TAKATORI CORPORATION
- Current Assignee Address: DE Kirchheim b. Munich; JP Kashihara
- Agency: MH2 Technology Law Group, LLP
- International Application: PCT/JP2018/016542 WO 20180424
- International Announcement: WO2019/207633 WO 20191031
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/68 ; H01L21/687

Abstract:
To perform alignment of a protective tape having a protective layer with high accuracy, provided is an alignment device (5) to be used for applying a protective tape (PT) to a semiconductor wafer (W), including: a tape holding body (30) configured to hold the protective tape (PT) laminated with a protective layer (PL) having an outer diameter smaller than an outer diameter of the protective tape (PT), and one image pickup means (50) for imaging a plurality of parts of an outer peripheral edge portion of the protective layer (PL), wherein the alignment device is configured to determine a center position of the protective layer (PL) based on positional information on each of the plurality of parts of the outer peripheral edge portion of the protective layer (PL) through determination of the positional information on the each of the plurality of parts based on image data acquired by imaging of the image pickup means (50).
Public/Granted literature
- US20210249294A1 ALIGNMENT DEVICE AND ALIGNMENT METHOD Public/Granted day:2021-08-12
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