- Patent Title: Semiconductor memory device and method of manufacturing the same
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Application No.: US17512047Application Date: 2021-10-27
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Publication No.: US12213318B2Publication Date: 2025-01-28
- Inventor: Sun Mi Park , Nam Kuk Kim , Eun Mee Kwon , Sang Wan Jin
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: WILLIAM PARK & ASSOCIATES LTD.
- Priority: KR10-2021-0062782 20210514
- Main IPC: H10B43/35
- IPC: H10B43/35 ; H01L25/065 ; H10B43/27

Abstract:
A semiconductor memory device, and a method of manufacturing the same, includes a lower stack in which a plurality of first interlayer insulating layers and first conductive layers are alternately stacked, a plurality of cell plugs passing through the lower stack in a vertical direction, an upper stack in which a plurality of second interlayer insulating layers and at least one second conductive layer are alternately stacked on the lower stack, a plurality of drain select plugs passing through the upper stack and being in contact with an upper portion of the plurality of cell plugs, and a separation pattern separating adjacent drain select plugs among the plurality of drain select plugs, wherein the separation pattern is in contact with a sidewall of each of the adjacent drain select plugs.
Public/Granted literature
- US12245433B2 Semiconductor memory device and method of manufacturing the same Public/Granted day:2025-03-04
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