Invention Grant
- Patent Title: Microelectronic devices with a polysilicon structure above a staircase structure, and related methods
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Application No.: US18356997Application Date: 2023-07-21
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Publication No.: US12218081B2Publication Date: 2025-02-04
- Inventor: Jivaan Kishore Jhothiraman , John M. Meldrim , Lifang Xu
- Applicant: Lodestar Licensing Group, LLC
- Applicant Address: US IL Evanston
- Assignee: Lodestar Licensing Group, LLC
- Current Assignee: Lodestar Licensing Group, LLC
- Current Assignee Address: US IL Evanston
- Agency: TraskBritt
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/768 ; H01L23/522 ; H01L23/528 ; H01L23/535 ; H10B41/27 ; H10B41/35 ; H10B41/41 ; H10B43/27 ; H10B43/35 ; H10B43/40

Abstract:
Microelectronic devices include a stack structure of insulative structures vertically alternating with conductive structures and arranged in tiers forming opposing staircase structures. A polysilicon fill material substantially fills an opening (e.g., a high-aspect-ratio opening) between the opposing staircase structures. The polysilicon fill material may have non-compressive stress such that the stack structure may be partitioned into blocks without the blocks bending and without contacts—formed in at least one of the polysilicon fill material and the stack structure—deforming, misaligning, or forming electrical shorts with neighboring contacts.
Public/Granted literature
- US20230361053A1 MICROELECTRONIC DEVICES WITH A POLYSILICON STRUCTURE ABOVE A STAIRCASE STRUCTURE, AND RELATED METHODS Public/Granted day:2023-11-09
Information query
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