Invention Grant
- Patent Title: Manufacturing method of semiconductor structure and semiconductor structure
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Application No.: US17661359Application Date: 2022-04-29
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Publication No.: US12218220B2Publication Date: 2025-02-04
- Inventor: Shuai Guo , Mingguang Zuo , Shijie Bai
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Syncoda LLC
- Agent Feng Ma
- Priority: CN202210049426.0 20220117
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L29/66 ; H01L29/786

Abstract:
The present disclosure provides a semiconductor structure and a manufacturing method thereof. The manufacturing method includes: depositing a thin-film stacked structure on a substrate; forming a first hole in the thin-film stacked structure; growing an epitaxial silicon pillar in the first hole; etching the thin-film stacked structure and the epitaxial silicon pillar along a first direction to form a first trench, the first trench passing through a center of the epitaxial silicon pillar and dividing the epitaxial silicon pillar into a first half pillar and a second half pillar; forming a first isolation layer; forming a first channel region of a first doping type, and forming a second channel region of a second doping type; and forming a gate dielectric layer and a gate conductive layer on a surface of each of the first channel region and the second channel region.
Public/Granted literature
- US20230231036A1 MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR STRUCTURE Public/Granted day:2023-07-20
Information query
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