Invention Grant
- Patent Title: Semiconductor device and manufacturing method
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Application No.: US17409809Application Date: 2021-08-24
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Publication No.: US12218228B2Publication Date: 2025-02-04
- Inventor: Koh Yoshikawa , Masayuki Momose , Toshiyuki Matsui
- Applicant: FUJI ELECTRIC CO., LTD.
- Applicant Address: JP Kanagawa
- Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee Address: JP Kanagawa
- Priority: JP2019-165167 20190911
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/06 ; H01L29/423 ; H01L29/739 ; H01L29/78

Abstract:
Provided is a semiconductor device, including: a semiconductor substrate including a bulk donor; an active portion provided on the semiconductor substrate; and an edge termination structure portion provided between the active portion and an end side of the semiconductor substrate on a upper surface of the semiconductor substrate; wherein the active portion includes hydrogen, and has a first high concentration region with a higher donor concentration than a bulk donor concentration; and the edge termination structure portion, which is provided in a range that is wider than the first high concentration region in a depth direction of the semiconductor substrate, includes hydrogen, and has a second high concentration region with a higher donor concentration than the bulk donor concentration.
Public/Granted literature
- US20210384330A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD Public/Granted day:2021-12-09
Information query
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