Invention Grant
- Patent Title: Vertical transistor structures and methods utilizing selective formation
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Application No.: US17529051Application Date: 2021-11-17
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Publication No.: US12218244B2Publication Date: 2025-02-04
- Inventor: Mark I. Gardner , H. Jim Fulford , Partha Mukhopadhyay
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/092 ; H01L29/66

Abstract:
Vertical transistors and methods of manufacturing vertical transistors are disclosed. The method can include forming a stack of layers include a first layer stack of a first transistor structure including at least three layers of a conductive material separated by one or more layers of at least one dielectric material. The stack of layers can include a second layer stack of a second transistor structure including at least three layers of a conductive material separated by one or more layers of at least one dielectric material, the second layer stack associated with a second transistor structure. The first and second transistor structures are separated by one or more dielectric materials. The method can include forming a channel opening in the stack. The method includes selectively forming a first channel structure within the channel opening and selectively forming a second channel structure within the channel opening.
Public/Granted literature
- US20230010879A1 VERTICAL TRANSISTOR STRUCTURES AND METHODS UTILIZING SELECTIVE FORMATION Public/Granted day:2023-01-12
Information query
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