A semiconductor manufacturing apparatus according to an embodiment includes a chuck configured to receive a carrier thereon, a carrier contact device configured to contact the carrier on the chuck, and a bonding head configured to transfer a semiconductor die to the carrier and configured to attach the semiconductor die on the carrier. The chuck includes a chuck reference key positioned at an edge portion thereof. The carrier contact device includes a contact position recognition key. The semiconductor manufacturing apparatus also includes a camera configured to obtaining images of the chuck reference key and the contact position recognition key.