Invention Grant
- Patent Title: Manufacturing micro-LED displays to reduce subpixel crosstalk
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Application No.: US17701599Application Date: 2022-03-22
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Publication No.: US12224272B2Publication Date: 2025-02-11
- Inventor: Lisong Xu , Byung Sung Kwak , Mingwei Zhu , Hou T. Ng , Nag B. Patibandla , Christopher Dennis Bencher
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: H01L25/16
- IPC: H01L25/16 ; H01L25/075 ; H01L33/00 ; H01L33/44 ; H01L33/48 ; H01L33/54 ; H01L33/58 ; H01L33/60 ; H01L33/32

Abstract:
A method for manufacturing micro-LED displays includes depositing a first material over a substrate having a plurality of micro-LEDs such that the plurality of micro-LEDs are covered by the first material and the first material fills gaps laterally separating the micro-LEDs, removing a portion of the first material from the gaps that laterally separate the plurality of micro-LEDs to form trenches that extend to or below light-emitting layers of the micro-LEDs, depositing a second material over the substrate such that the second material covers the first material and extends into the trenches, and removing a portion of the first and second material over the plurality of micro-LEDs to expose top surfaces of the plurality of micro-LEDs and such that isolation walls positioned in the gaps between the plurality of micro-LEDs extend vertically higher than the top surface of the first material.
Public/Granted literature
- US20220310872A1 MANUFACTURING MICRO-LED DISPLAYS TO REDUCE SUBPIXEL CROSSTALK Public/Granted day:2022-09-29
Information query
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