Invention Grant
- Patent Title: Solidly-mounted transversely-excited film bulk acoustic resonators and filters for 27 GHz communications bands
-
Application No.: US17558090Application Date: 2021-12-21
-
Publication No.: US12224732B2Publication Date: 2025-02-11
- Inventor: Gregory L. Hey-Shipton , Neal Fenzi , Mike Eddy , Ventsislav Yantchev
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: ArentFox Schiff LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/02 ; H03H9/13 ; H03H9/17 ; H03H9/56

Abstract:
Resonator devices and filter devices are disclosed. An acoustic resonator includes a substrate and a piezoelectric plate having front and back surfaces separated by a piezoelectric plate thickness greater than or equal to 50 nm and less than or equal to 200 nm. An acoustic Bragg reflector is between the substrate and the back surface of the piezoelectric plate. A conductor pattern including an interdigital transducer (IDT) is on the front surface of the piezoelectric plate.
Public/Granted literature
Information query