Method of manufacturing semiconductor structure and semiconductor structure
Abstract:
The present disclosure provides a method of manufacturing a semiconductor structure, and a semiconductor structure, relating to the technical field of semiconductors. The method of manufacturing a semiconductor structure includes: providing a substrate; forming multiple initial active pillars on the substrate; forming a gate layer between initial active pillars; and forming a first dielectric layer with openings on the gate layer and on the initial active pillars; removing part of the initial active pillar located in each opening to form an active pillar; and removing part of the gate layer to form an isolation trench and a word line, such that two adjacent active pillars in the same row are located on two sides of the isolation trench.
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