Invention Grant
- Patent Title: Three-dimensional memory device with doped semiconductor bridge structures and methods for forming the same
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Application No.: US17530861Application Date: 2021-11-19
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Publication No.: US12225720B2Publication Date: 2025-02-11
- Inventor: Ryousuke Itou , Akihisa Sai , Kenzo Iizuka
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: THE MARBURY LAW GROUP PLLC
- Main IPC: H10B41/27
- IPC: H10B41/27 ; H01L21/3213 ; H01L21/768 ; H10B41/10 ; H10B43/10 ; H10B43/27 ; H01L23/522 ; H01L23/532

Abstract:
A vertically alternating sequence of continuous insulating layers and continuous sacrificial material layers is formed over a substrate, and memory opening fill structures including vertical stacks of memory elements are formed through the vertically alternating sequence. Backside trenches are formed to divide the vertically alternating sequence into a plurality of alternating stacks of insulating layers and sacrificial material layers. Bridge structures are formed within each of the backside trenches. The sacrificial material layers are replaced with electrically conductive layers while the bridge structure are present within the backside trenches.
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