Invention Grant
- Patent Title: Three-dimensional semiconductor memory device and electronic system including the same
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Application No.: US17377840Application Date: 2021-07-16
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Publication No.: US12225730B2Publication Date: 2025-02-11
- Inventor: Sehoon Lee , Byoungil Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR10-2020-0131991 20201013
- Main IPC: H10B43/35
- IPC: H10B43/35 ; H01L23/522 ; H10B41/10 ; H10B41/27 ; H10B41/35 ; H10B41/46 ; H10B43/10 ; H10B43/27 ; H10B43/40

Abstract:
Disclosed are three-dimensional semiconductor memory devices, methods of fabricating the same, and electronic systems including the same. The device includes a substrate including a cell array region and an extension region, stack structures extending in a first direction and including gate electrodes stacked on the substrate, vertical structures penetrating the stack structures on the cell array region, a mold structure on a portion of the extension region, a first support structure extending in the first direction between the stack structures, second support structures penetrating the stack structures on the extension region and spaced apart in a second direction from the first support structure, and a third support structure surrounding the mold structure in a plan view. Respective top surfaces of ones of the second support structures and a top surface of the third support structure is higher than a top surface of ones of the vertical structures.
Public/Granted literature
- US20220115390A1 THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE AND ELECTRONIC SYSTEM INCLUDING THE SAME Public/Granted day:2022-04-14
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