- Patent Title: Display substrate and manufacturing method thereof, display device
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Application No.: US18338421Application Date: 2023-06-21
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Publication No.: US12230695B2Publication Date: 2025-02-18
- Inventor: Meng Zhao
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE Technology Group Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: HOUTTEMAN LAW LLC
- Priority: CN202011329036.6 20201124
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/66 ; H01L29/786

Abstract:
The present disclosure provides a display substrate and a manufacturing method thereof, and a display device, belongs to the field of display technology. The method includes forming a first thin film transistor, which includes: forming a first gate of the first thin film transistor on a base substrate through a patterning process; forming a first gate insulating layer on a side of the first gate distal to the base substrate; sequentially forming a first semiconductor material layer, a second gate insulating layer and a second gate metal layer on a side of the first gate insulating layer distal to the base substrate, and forming a pattern including an active layer of the first thin film transistor, a pattern of the second gate insulating layer and a second gate of the first thin film transistor through a patterning process.
Public/Granted literature
- US20230335624A1 DISPLAY SUBSTRATE AND MANUFACTURING METHOD THEREOF, DISPLAY DEVICE Public/Granted day:2023-10-19
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