Invention Grant
- Patent Title: Bonded memory device and fabrication methods thereof
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Application No.: US17100852Application Date: 2020-11-21
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Publication No.: US12232316B2Publication Date: 2025-02-18
- Inventor: Shengwei Yang , Zhongyi Xia , Kun Han , Kang Li , Xiaoguang Wang , Hongbin Zhu
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: BAYES PLLC
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H10B43/40

Abstract:
Embodiments of three-dimensional (3D) memory devices formed by bonded semiconductor devices and methods for forming the same are disclosed. In an example, a method for forming a semiconductor device is disclosed. The method includes the following operations. First, an insulating material layer can be formed over a substrate. In an example, single-crystalline silicon is not essential to the substrate. The insulating material layer can be patterned to form an isolation structure and a plurality of trenches in the isolation structure. A semiconductor material can be deposited to fill up the plurality of trenches to form a plurality of array-base regions in the isolation structure, the isolation structure insulating the plurality of array-base regions from one another. Further, a plurality of memory arrays can be formed over the plurality of array-base regions, and an insulating structure can be formed to cover the plurality of memory arrays and the plurality of array-base regions.
Public/Granted literature
- US20210104542A1 BONDED MEMORY DEVICE AND FABRICATION METHODS THEREOF Public/Granted day:2021-04-08
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