Invention Grant
- Patent Title: Apparatus for and method of optical component alignment
-
Application No.: US18370488Application Date: 2023-09-20
-
Publication No.: US12244116B2Publication Date: 2025-03-04
- Inventor: Hong Ye
- Applicant: Cymer, LLC
- Applicant Address: US CA San Diego
- Assignee: Cymer, LLC
- Current Assignee: Cymer, LLC
- Current Assignee Address: US CA San Diego
- Agency: DiBerardino McGovern IP Group LLC
- Main IPC: H01S3/00
- IPC: H01S3/00 ; G02B5/20 ; G03F7/00

Abstract:
Apparatus for and method of aligning optical components such as mirrors to facilitate proper beam alignment using an image integration optical system is used to integrate images from multiple optical features such as from both left mirror bank and right mirror bank to present the images simultaneously to the camera system. A fluorescent material may be used to render a beam footprint visible and the relative positions of the footprint and an alignment feature may be used to align the optical feature.
Public/Granted literature
- US20240014621A1 APPARATUS FOR AND METHOD OF OPTICAL COMPONENT ALIGNMENT Public/Granted day:2024-01-11
Information query