Invention Grant
- Patent Title: Method of manufacturing integrated circuit configured with two or more single crystal acoustic resonator devices
-
Application No.: US17938190Application Date: 2022-10-05
-
Publication No.: US12244289B2Publication Date: 2025-03-04
- Inventor: Jeffrey B. Shealy
- Applicant: Akoustis, Inc.
- Applicant Address: US NC Huntersville
- Assignee: Akoustis, Inc.
- Current Assignee: Akoustis, Inc.
- Current Assignee Address: US NC Huntersville
- Agency: Ogawa P.C.
- Agent Richard T. Ogawa
- Main IPC: H03H3/08
- IPC: H03H3/08 ; H03H3/02 ; H03H9/00 ; H03H9/02 ; H03H9/05 ; H03H9/17 ; H03H9/205 ; H03H9/54 ; H03H9/56 ; H03H9/60 ; H03H9/64 ; H10N30/06 ; H10N30/85

Abstract:
A method of fabricating a configurable single crystal acoustic resonator (SCAR) device integrated circuit. The method includes providing a bulk substrate structure having first and second recessed regions with a support member disposed in between. A thickness of single crystal piezo material is formed overlying the bulk substrate with an exposed backside region configured with the first recessed region and a contact region configured with the second recessed region. A first electrode with a first terminal is formed overlying an upper portion of the piezo material, while a second electrode with a second terminal is formed overlying a lower portion of the piezo material. An acoustic reflector structure and a dielectric layer are formed overlying the resulting bulk structure. The resulting device includes a plurality of single crystal acoustic resonator devices, numbered from (R1) to (RN), where N is an integer greater than 1.
Public/Granted literature
Information query