Invention Grant
- Patent Title: Method for fabricating a magnetoresistive element comprising discontinuous interconnect segments
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Application No.: US17204678Application Date: 2021-03-17
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Publication No.: US12249361B2Publication Date: 2025-03-11
- Inventor: Sylvain Martin , Julien Louche , Marc Drouard
- Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- Applicant Address: FR Paris
- Assignee: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- Current Assignee: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- Current Assignee Address: FR Paris
- Agency: Blank Rome LLP
- Priority: EP20315039 20200317
- Main IPC: G11C11/16
- IPC: G11C11/16 ; H10B61/00 ; H10N50/01 ; H10N50/10 ; H10N50/80 ; H10N50/85 ; H10N59/00

Abstract:
The present disclosure concerns a method for fabricating a magnetoresistive element comprising a magnetic tunnel junction including a tunnel barrier layer, a first ferromagnetic layer and a second ferromagnetic layer; a writing current layer; and an interconnect layer configured for supplying the writing current to the writing current layer. A gap is provided in the interconnect layer such that the latter comprises two discontinuous interconnect segments extending along a layer plane and connecting the writing current layer in series. The method comprises: depositing the interconnect layer, writing current layer, second ferromagnetic layer, tunnel barrier layer and first ferromagnetic layer; forming the gap in the interconnect layer; filling the gap with the gap material; and forming the pillar by performing a single etch step until the interconnect layer, acting as a stop layer, is reached.
Public/Granted literature
- US20210295887A1 METHOD FOR FABRICATING A MAGNETORESISTIVE ELEMENT COMPRISING DISCONTINUOUS INTERCONNECT SEGMENTS Public/Granted day:2021-09-23
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