Invention Grant
- Patent Title: Support device for supporting a substrate, method of processing a substrate and semiconductor substrate
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Application No.: US17793344Application Date: 2020-02-27
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Publication No.: US12255088B2Publication Date: 2025-03-18
- Inventor: Daniele Andreola , Giorgio Cellere , Alvise Fecchio , Valentina Furin , Enrico Pasqualetto , Alessio Zanchettin , Marco Galiazzo
- Applicant: APPLIED MATERIALS ITALIA S.R.L.
- Applicant Address: IT San Biagio di Callalta
- Assignee: APPLIED MATERIALS ITALIA S.R.L.
- Current Assignee: APPLIED MATERIALS ITALIA S.R.L.
- Current Assignee Address: IT San Biagio di Callalta
- Agency: Patterson + Sheridan, LLP
- International Application: PCT/EP2020/055177 WO 20200227
- International Announcement: WO2021/170240 WO 20210902
- Main IPC: H01L21/683
- IPC: H01L21/683 ; B23K26/38 ; B25B11/00 ; H01L21/268 ; H01L21/67 ; H01L21/78
Abstract:
A support device includes a substrate receiving region. The support device includes a support body shaped as a pattern having an array of openings. The support body is a sparse structure wherein a joint area of the openings of the array of openings is 40% or more of the area of the substrate receiving region. The support body includes one or more suction openings configured to be in fluid communication with a vacuum source arrangement.
Public/Granted literature
- US20230058931A1 SUPPORT DEVICE FOR SUPPORTING A SUBSTRATE, METHOD OF PROCESSING A SUBSTRATE AND SEMICONDUCTOR SUBSTRATE Public/Granted day:2023-02-23
Information query
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