Invention Grant
- Patent Title: Acoustic wave device and filter
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Application No.: US17199349Application Date: 2021-03-11
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Publication No.: US12255604B2Publication Date: 2025-03-18
- Inventor: Mamoru Ishida , Takashi Matsuda
- Applicant: TAIYO YUDEN CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: CHEN YOSHIMURA LLP
- Priority: JP2020-046698 20200317
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/13 ; H03H9/17 ; H03H9/56 ; H03H9/70

Abstract:
An acoustic wave device includes a piezoelectric layer, the piezoelectric layer being a rotated Y-cut lithium niobate substrate or an X-cut lithium tantalate substrate; an upper conductive layer having a substantially consistent density, on or over the upper surface of the piezoelectric layer; a lower conductive layer having a substantially consistent density, on or below the lower surface of the piezoelectric layer; and a first additional film having a substantially consistent density, wherein at least one of the upper and lower conductive layers is mainly made of ruthenium, chrome, copper, molybdenum, tungsten, tantalum, platinum, rhodium, or iridium, and wherein at least a part of the first additional film is in the resonance region in the plan view, and the density of the first additional film is equal to or less than the density of aluminum.
Public/Granted literature
- US20210297055A1 ACOUSTIC WAVE DEVICE AND FILTER Public/Granted day:2021-09-23
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