Invention Grant
- Patent Title: Transversely-excited film bulk acoustic resonators with electrodes having a second layer of variable width
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Application No.: US18498887Application Date: 2023-10-31
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Publication No.: US12255605B2Publication Date: 2025-03-18
- Inventor: Viktor Plesski , Julius Koskela
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: ArentFox Schiff LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/205 ; H03H9/56

Abstract:
There is disclosed acoustic resonators and filter devices. An acoustic resonator device includes a piezoelectric plate, and an interdigital transducer (IDT) formed on a front surface of the piezoelectric plate. The IDT includes interleaved fingers. At least one of the interleaved fingers includes a first layer adjacent the piezoelectric plate and a second layer over the first layer, wherein a width of the first layer is constant, and wherein a width of the second layer varies along a length of the at least one interleaved finger.
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