Invention Grant
- Patent Title: Salient feature point based image alignment
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Application No.: US17676772Application Date: 2022-02-21
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Publication No.: US12266143B2Publication Date: 2025-04-01
- Inventor: Chaohong Wu , Songyang Yu , Premchandra M. Shankar
- Applicant: KLA Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Entropy Matters LLC
- Main IPC: G06V10/24
- IPC: G06V10/24 ; G06T7/33 ; G06V10/22

Abstract:
Methods and systems for image alignment are provided. One method includes selecting three or more salient feature points for use in test image to reference image alignment by applying a selected salient feature point detection method to at least a reference image generated for the specimen. The method also includes detecting the three or more salient feature points in the test image and the reference image and aligning the detected three or more salient feature points in the test image to the detected three or more salient feature points in the reference image. The method further includes aligning remaining portions of the test image to remaining portions of the reference image based on results of the previous aligning step.
Public/Granted literature
- US20220327796A1 SALIENT FEATURE POINT BASED IMAGE ALIGNMENT Public/Granted day:2022-10-13
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