Invention Grant
- Patent Title: Vertical-cavity surface-emitting laser array with integrated capacitor
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Application No.: US17305140Application Date: 2021-06-30
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Publication No.: US12266902B2Publication Date: 2025-04-01
- Inventor: Siu Kwan Cheung , Matthew Glenn Peters , Mohammad Ali Shirazi Hosseini Dokht , Hao Huang , Lijun Zhu
- Applicant: Lumentum Operations LLC
- Applicant Address: US CA San Jose
- Assignee: Lumentum Operations LLC
- Current Assignee: Lumentum Operations LLC
- Current Assignee Address: US CA San Jose
- Agency: Harrity & Harrity, LLP
- Main IPC: H01S5/026
- IPC: H01S5/026 ; H01S5/042 ; H01S5/183 ; H01S5/42

Abstract:
An optical chip may include a vertical-cavity surface-emitting laser (VCSEL) structure. The optical chip may include a capacitor over at least a portion of an active layer of the VCSEL structure that is outside of an active region of the VCSEL structure. The capacitor may include a first metal layer over the portion of the active layer, a dielectric layer on the first metal layer, and a second metal layer on the dielectric layer. The optical chip may include an isolation region between a substrate of the VCSEL and a portion of the capacitor outside of the VCSEL.
Public/Granted literature
- US20220209500A1 VERTICAL-CAVITY SURFACE-EMITTING LASER ARRAY WITH INTEGRATED CAPACITOR Public/Granted day:2022-06-30
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