Invention Grant
- Patent Title: Memory device and method of fabricating the same
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Application No.: US17721235Application Date: 2022-04-14
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Publication No.: US12268000B2Publication Date: 2025-04-01
- Inventor: Chia-Tze Huang
- Applicant: MACRONIX International Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX International Co., Ltd.
- Current Assignee: MACRONIX International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. PATENTS
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H01L23/528 ; H10B41/10 ; H10B41/27 ; H10B43/10

Abstract:
A memory device includes a gate stack structure, a channel pillar, a plurality of conductive pillars, and a charge storage structure. The gate stack structure is located over a dielectric substrate, and includes a plurality of gate layers and a plurality of insulating layers stacked alternately with each other. The channel pillar extends through the gate stack structure. Each of the conductive pillars includes a body portion and an extension portion. The body portion extends through the gate stack structure and is electrically connected to the channel pillar. The extension portion is below and is electrically isolated from the channel pillar. The charge storage structure is between the channel pillar and the plurality of gate layers.
Public/Granted literature
- US20230337426A1 MEMORY DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2023-10-19
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