Invention Grant
- Patent Title: Semiconductor structures
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Application No.: US17613628Application Date: 2020-07-21
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Publication No.: US12268015B2Publication Date: 2025-04-01
- Inventor: Kai Cheng
- Applicant: ENKRIS SEMICONDUCTOR, INC.
- Applicant Address: CN Jiangsu
- Assignee: ENKRIS SEMICONDUCTOR, INC.
- Current Assignee: ENKRIS SEMICONDUCTOR, INC.
- Current Assignee Address: CN Jiangsu
- Agency: The Small Patent Law Group LLC
- Agent Christopher R. Carroll
- International Application: PCT/CN2020/103334 WO 20200721
- International Announcement: WO2022/016390 WO 20220127
- Main IPC: H10D62/824
- IPC: H10D62/824 ; H10D30/47 ; H10D62/815 ; H10D62/85

Abstract:
The present application provides a semiconductor structure. The semiconductor structure includes a channel layer and a barrier layer provided on the channel layer. The barrier layer includes multiple barrier layers arranged in a stack, the multiple barrier sub-layers include at least three barrier sub-layers, and Al component proportions of the multiple barrier sub-layers vary along a growth direction of the barrier layer for at least one up-and-down fluctuation.
Public/Granted literature
- US20220320326A1 SEMICONDUCTOR STRUCTURES Public/Granted day:2022-10-06
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