An analog-to-digital converter circuit includes: a reference voltage node configured to be supplied with a reference voltage; an analog-to-digital converter circuit unit including a reference voltage input node configured to be electrically connected to the reference voltage node, the reference voltage being input to the reference voltage input node, the analog-to-digital converter circuit unit configured to convert an input analog voltage into a digital value based on the reference voltage; a voltage generation circuit configured to be electrically connected to the reference voltage node and generate an internal operating voltage based on the reference voltage; and a charge compensation circuit configured to operate based on the internal operating voltage, and during operation of the analog-to-digital converter circuit unit, the charge compensation circuit configured to compensate the reference voltage input node for charge.