Invention Grant
- Patent Title: Flash memory layout to eliminate floating gate bridge
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Application No.: US18227067Application Date: 2023-07-27
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Publication No.: US12274054B2Publication Date: 2025-04-08
- Inventor: Shun-Neng Wang , Tung-Huang Chen , Ching-Hung Kao
- Applicant: Taiwan Semiconductor Manufacturing Company LTD
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company LTD
- Current Assignee: Taiwan Semiconductor Manufacturing Company LTD
- Current Assignee Address: TW Hsinchu
- Agency: Lippes Mathias LLP
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L29/423 ; H01L29/66 ; H01L29/788 ; H10B41/10

Abstract:
A flash memory includes a linear array of flash memory cells having a source region extending along a first direction. Each flash memory cell includes a floating gate disposed adjacent the source region. The linear array of flash memory cells further includes isolation strips disposed between the floating gates of the flash memory cells. An erase gate line extends along the first direction and is disposed over the source region. A control gate line extends along the first direction and is disposed over the isolation strips and over the floating gates of the flash memory cells. The control gate line has a non-straight edge proximate to the source region that is indented away from the source region at least where the control gate line is disposed over the isolation strips.
Public/Granted literature
- US20230371250A1 FLASH MEMORY LAYOUT TO ELIMINATE FLOATING GATE BRIDGE Public/Granted day:2023-11-16
Information query
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