Invention Grant
- Patent Title: Efficient scheduling of tasks for resolution enhancement technique operations
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Application No.: US17629923Application Date: 2019-08-21
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Publication No.: US12277377B2Publication Date: 2025-04-15
- Inventor: Soohong Austin Kim , Hien T. Vu
- Applicant: Siemens Industry Software Inc.
- Applicant Address: US TX Plano
- Assignee: Siemens Industry Software Inc.
- Current Assignee: Siemens Industry Software Inc.
- Current Assignee Address: US TX Plano
- International Application: PCT/US2019/047394 WO 20190821
- International Announcement: WO2021/034321 WO 20210225
- Main IPC: G06F30/398
- IPC: G06F30/398 ; G06F30/392

Abstract:
A system and method for scheduling optical proximity correction (OPC) or other resolution enhancement technique (RET) operations on a layout design is disclosed. A layout design is divided into a plurality of regions, such as a plurality of tiles. OPC is performed on the plurality of tiles in order to generate a modified layout design. Performing OPC on the plurality of tiles may be time consuming. In order to more efficiently distribute the processing of OPC, estimates of OPC processing times for the plurality of tiles is performed. The estimate of the OPC processing time for a respective tile may be based on one or both of analysis of: analysis of the respective tile; or analysis of tile(s) that neighbor the respective tile. Based on the estimates, tiles that have a longer estimated processing tile are scheduled before tiles that have a shorter estimated processing time, thereby potentially resulting in more efficient OPC processing.
Public/Granted literature
- US20220292249A1 EFFICIENT SCHEDULING OF TASKS FOR RESOLUTION ENHANCEMENT TECHNIQUE OPERATIONS Public/Granted day:2022-09-15
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