Invention Grant
- Patent Title: Phase change memory unit and preparation method therefor
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Application No.: US17786526Application Date: 2020-07-23
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Publication No.: US12279538B2Publication Date: 2025-04-15
- Inventor: Min Zhong , Ming Li , Shoumian Chen , Gaoming Feng
- Applicant: Shanghai Integrated Circuit Equipment & Materials Industry Innovation Center Co., Ltd. , SHANGHAI IC R&D CENTER CO., LTD.
- Applicant Address: CN Shanghai; CN Shanghai
- Assignee: Shanghai Integrated Circuit Equipment & Materials Industry Innovation Center Co., Ltd.,SHANGHAI IC R&D CENTER CO., LTD.
- Current Assignee: Shanghai Integrated Circuit Equipment & Materials Industry Innovation Center Co., Ltd.,SHANGHAI IC R&D CENTER CO., LTD.
- Current Assignee Address: CN Shanghai; CN Shanghai
- Agency: Bayramoglu Law Offices LLC
- Priority: CN201911315353.X 20191219,CN201911315361.4 20191219
- International Application: PCT/CN2020/103754 WO 20200723
- International Announcement: WO2021/120620 WO 20210624
- Main IPC: H10N70/00
- IPC: H10N70/00 ; H10B63/00 ; H10B63/10 ; H10N70/20

Abstract:
The present invention disclosures a phase change memory unit, wherein comprising from bottom to top: a bottom electrode, a heating electrode, a phase change unit and a top electrode, the phase change unit is a longitudinally arranged column, which comprises: a cylindrical selector layer, a circular barrier layer and a circular phase change material layer form inside to outside; wherein, the bottom electrode, the heating electrode and the circular phase change material layer are sequentially connected, and the selector layer is connected to the top electrode. The present invention using trench sidewall deposition or via filling, forming the cylindrical phase change unit which is a circular nested structure, which can improve reliability of a device, greatly reduce volume of a phase change operation area and heat energy required, thus heating efficiency is improved obviously, the power consumption of the device is reduced, and high-density storage is realized.
Public/Granted literature
- US20230363299A1 PHASE CHANGE MEMORY UNIT AND PREPARATION METHOD THEREFOR Public/Granted day:2023-11-09
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