Artificial intelligence enabled metrology
Abstract:
Methods and systems for implementing artificial intelligence enabled metrology are disclosed. An example method includes segmenting a first image of structure into one or more classes to form an at least partially segmented image, associating at least one class of the at least partially segmented image with a second image, and performing metrology on the second image based on the association with at least one class of the at least partially segmented image.
Public/Granted literature
Information query
Patent Agency Ranking
0/0