Invention Grant
- Patent Title: Artificial intelligence enabled metrology
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Application No.: US17965217Application Date: 2022-10-13
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Publication No.: US12293525B2Publication Date: 2025-05-06
- Inventor: John Flanagan , Brad Larson , Thomas Miller
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Michael Best & Friedrich LLP
- Main IPC: G06T7/12
- IPC: G06T7/12 ; G06F18/243 ; G06N3/045 ; G06N3/08 ; G06N20/20 ; G06T7/00 ; G06T7/10 ; G06T7/11 ; G06T7/13 ; G06T7/174 ; G06T7/30 ; G06V10/26 ; G06V10/44 ; G06V10/764 ; G06V10/82

Abstract:
Methods and systems for implementing artificial intelligence enabled metrology are disclosed. An example method includes segmenting a first image of structure into one or more classes to form an at least partially segmented image, associating at least one class of the at least partially segmented image with a second image, and performing metrology on the second image based on the association with at least one class of the at least partially segmented image.
Public/Granted literature
- US20230034667A1 Artificial Intelligence Enabled Metrology Public/Granted day:2023-02-02
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