Invention Grant
- Patent Title: Semiconductor structure and method for manufacturing thereof
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Application No.: US17461668Application Date: 2021-08-30
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Publication No.: US12293970B2Publication Date: 2025-05-06
- Inventor: Shih-Hsiang Kao , Chi-Wen Chang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT LAW
- Agent Anthony King
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L21/768 ; H01L23/50 ; H01L23/522

Abstract:
A semiconductor structure is provided. The semiconductor structure includes a substrate and a metallization layer. The metallization layer is disposed over the substrate. The metallization layer includes a first signal line, a second signal line, and a third signal line, wherein the first signal line, the second signal line, and the third signal line are arranged in a first row between a power rail and a ground rail parallel to the power rail. A first distance between the first signal line and the second signal line is different from a second distance between the second signal line and the third signal line. A method for manufacturing a semiconductor structure is also provided.
Public/Granted literature
- US20230065397A1 SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THEREOF Public/Granted day:2023-03-02
Information query
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