Invention Grant
- Patent Title: Silicon carbide semiconductor device
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Application No.: US17755235Application Date: 2020-11-20
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Publication No.: US12295158B2Publication Date: 2025-05-06
- Inventor: Yu Saitoh , Takeyoshi Masuda
- Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Applicant Address: JP Osaka
- Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Current Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Current Assignee Address: JP Osaka
- Agency: IPUSA, PLLC
- Priority: JP2019-230976 20191220
- International Application: PCT/JP2020/043436 WO 20201120
- International Announcement: WO2021/124800 WO 20210624
- Main IPC: H10D62/10
- IPC: H10D62/10 ; H01L21/04 ; H10D12/01 ; H10D30/66 ; H10D62/17 ; H10D62/832

Abstract:
A silicon carbide semiconductor device includes a silicon carbide substrate having a first main surface and a second main surface opposite to the first main surface. A gate trench is provided in the first main surface. The gate trench is defined by side surfaces and a bottom surface. The side surfaces penetrate the source region and the body region to reach the drift region. The bottom surface connects to the side surfaces. The gate trench extends in a first direction parallel to the first main surface. The silicon carbide substrate further includes an electric field relaxation region that is the second conductive type, the electric field relaxation region being provided between the bottom surface and the second main surface and extending in the first direction, and a connection region that is the second conductive type, the connection region electrically connecting a contact region to the electric field relaxation region. In a plan view in a direction normal to the first main surface, the gate trench and the electric field relaxation region are disposed on a virtual line that extends in the first direction, and the connection region is in contact with the electric field relaxation region on the virtual line.
Public/Granted literature
- US20220384566A1 SILICON CARBIDE SEMICONDUCTOR DEVICE Public/Granted day:2022-12-01
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