Invention Grant
- Patent Title: Superjunction semiconductor device with different effective epitaxial layer thicknesses
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Application No.: US17584832Application Date: 2022-01-26
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Publication No.: US12295159B2Publication Date: 2025-05-06
- Inventor: Won Kook Cho , Myeong Bum Pyun
- Applicant: DB HiTek Co., Ltd.
- Applicant Address: KR Bucheon-si
- Assignee: DB HiTek Co., Ltd.
- Current Assignee: DB HiTek Co., Ltd.
- Current Assignee Address: KR Bucheon-si
- Agency: Central California IP Group, P.C.
- Agent Andrew D. Fortney
- Priority: KR10-2021-0027819 20210303
- Main IPC: H10D62/10
- IPC: H10D62/10 ; H10D30/01 ; H10D30/66 ; H10D62/17

Abstract:
A superjunction semiconductor device with an epitaxial layer having different effective thicknesses and a method of manufacturing the same are disclosed. The superjunction semiconductor device includes an epitaxial layer having different thicknesses in a cell region and a ring region to decrease a breakdown voltage of the cell region relative to a breakdown voltage of the ring region so as to reveal a characteristic of the breakdown voltage of the cell region.
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