Invention Grant
- Patent Title: Crossbar memory array in back end of line with crystallization front
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Application No.: US17457930Application Date: 2021-12-07
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Publication No.: US12295271B2Publication Date: 2025-05-06
- Inventor: Devendra K. Sadana , Ning Li , Bahman Hekmatshoartabari
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agent L. Jeffrey Kelly
- Main IPC: H10N70/20
- IPC: H10N70/20 ; G06N3/08 ; H10B63/00 ; H10N70/00

Abstract:
A crystallization seed layer in a substrate, a phase change material layer, the phase change material layer includes a similar lattice constant as a lattice constant of the crystallization seed layer, a top electrode adjacent to a first vertical side surface and a bottom electrode adjacent to a second vertical side surface of the phase change material layer. A plurality of memory structures configured in a crossbar array, each including a crystallization seed layer, a phase change material layer above, a top electrode adjacent to a first vertical side surface and a bottom electrode adjacent to a second vertical side surface of the phase change material layer. A method including forming a crystallization seed layer, forming a phase change material layer, forming a top electrode and a bottom electrode on the substrate, each adjacent to a vertical side surface of the phase change material layer.
Public/Granted literature
- US20230180638A1 CROSSBAR MEMORY ARRAY IN BACK END OF LINE WITH CRYSTALLIZATION FRONT Public/Granted day:2023-06-08
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