Invention Grant
- Patent Title: Transistor including downward extending silicide
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Application No.: US17704882Application Date: 2022-03-25
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Publication No.: US12300723B2Publication Date: 2025-05-13
- Inventor: Jung-Chien Cheng , Kuo-Cheng Chiang , Shi Ning Ju , Guan-Lin Chen , Bo-Rong Lin , Chih-Hao Wang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Seed IP Law Group
- Main IPC: H01L29/08
- IPC: H01L29/08 ; H01L29/06 ; H01L29/66

Abstract:
An integrated circuit includes a transistor having a plurality of semiconductor nanostructures arranged in a stack and corresponding to channel regions of the transistor. The transistor includes a source/drain region in contact with the channel regions. The transistor includes a silicide that extends downward along a side of the source/drain region.
Public/Granted literature
- US20230134161A1 TRANSISTOR INCLUDING DOWNWARD EXTENDING SILICIDE Public/Granted day:2023-05-04
Information query
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