Invention Grant
- Patent Title: GaN HEMT transistor with impact energy release capability for use in aerospace irradiation environment and preparation method thereof
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Application No.: US18647027Application Date: 2024-04-26
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Publication No.: US12300746B2Publication Date: 2025-05-13
- Inventor: Feng Zhou , Yu Rong , Hai Lu , Weizong Xu , Dong Zhou , Fangfang Ren
- Applicant: NANJING UNIVERSITY
- Applicant Address: CN Nanjing
- Assignee: NANJING UNIVERSITY
- Current Assignee: NANJING UNIVERSITY
- Current Assignee Address: CN Nanjing
- Agent Daniel M. Cohn
- Priority: CN202311343078.9 20231017
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L29/20 ; H01L29/45 ; H01L29/47 ; H01L29/66

Abstract:
The present invention discloses a GaN HEMT transistor with impact energy release capability for use in aerospace irradiation environment and preparation method thereof. The transistor includes a substrate layer, a gallium nitride layer, a barrier layer, and a gate structure successively arranged from bottom to top. The gallium nitride layers on both sides of the barrier layer are respectively provided with a source electrode and a drain electrode on the top surface. The gate structure is located near the source electrode and includes a p-type gallium nitride layer, a dielectric layer, an Ohmic metal pillar, and a Schottky metal layer. The present invention solves the breakdown problem caused by the inability to release impact energy during the switching process by introducing an asymmetric multi-integrated gate structure.
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