Piezoelectric motors with nanometer-level resolution
Abstract:
The present invention relates to a piezoelectric motor that can be moved with very fine resolution at the nanometer level by means of a piezoelectric element (piezo actuator) that increases in length when a voltage is applied. The piezoelectric motor according to the invention is characterized by comprising a body having an upper surface and a lower surface, and a side connecting the upper surface and the lower surface, a piezoelectric material disposed on the upper surface of the body and extending longitudinally therefrom, and a rod having an upper surface and a lower surface, and extending longitudinally, and having one end connected to one end of the piezoelectric material and disposed on the upper surface of the body, and a support member disposed to span the rod and providing a predetermined frictional force on the rod, wherein the support member is driven by the rod to interlock with a contraction or an expansion of the piezoelectric material, wherein a lower surface of the support member and the upper surface of the body are at least partially in butted, and wherein the support member is driven by sliding on the upper surface of the body.
Public/Granted literature
Information query
Patent Agency Ranking
0/0