Invention Grant
- Patent Title: Memory device and method of manufacturing the memory device
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Application No.: US17826812Application Date: 2022-05-27
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Publication No.: US12302547B2Publication Date: 2025-05-13
- Inventor: Jae Taek Kim
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: WILLIAM PARK & ASSOCIATES LTD.
- Priority: KR10-2021-0182933 20211220
- Main IPC: H10B12/00
- IPC: H10B12/00

Abstract:
Provided herein may be a memory device and a method of manufacturing the memory device. The memory device may include a connection structure formed on a substrate, lower contacts formed on the connection structure, upper contacts formed on the lower contacts, a dummy pattern configured to enclose the lower contacts and spaced apart from the lower contacts, etching stop patterns formed in an upper region of the dummy pattern, and dummy contacts formed over the etching stop patterns.
Public/Granted literature
- US20230200047A1 MEMORY DEVICE AND METHOD OF MANUFACTURING THE MEMORY DEVICE Public/Granted day:2023-06-22
Information query