Invention Grant
- Patent Title: Semiconductor memory device and method for fabricating the same
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Application No.: US17347195Application Date: 2021-06-14
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Publication No.: US12302574B2Publication Date: 2025-05-13
- Inventor: Young Rok Kim
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si Gyeonggi-do
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si Gyeonggi-do
- Agency: WILLIAM & ASSOCIATES LTD.
- Priority: KR10-2021-0016744 20210205
- Main IPC: H10B43/35
- IPC: H10B43/35 ; H01L23/528 ; H10B41/10 ; H10B41/27 ; H10B41/35 ; H10B43/10 ; H10B43/27

Abstract:
A semiconductor memory device includes: a gate electrode stack vertically stacked over a substrate with bent gate pads, the bent gate pads portion of the gate electrode stack having a step-shaped structure; an inter-layer dielectric layer covering the bent gate pads; and a plurality of contact plugs respectively coupled to the bent gate pads by penetrating the inter-layer dielectric layer, wherein the bent gate pads include angled corner portions of different sizes.
Public/Granted literature
- US20220254792A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2022-08-11
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