Invention Grant
- Patent Title: Method for fabricating poly-insulator-poly capacitor
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Application No.: US17882596Application Date: 2022-08-07
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Publication No.: US12302591B2Publication Date: 2025-05-13
- Inventor: Linggang Fang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: TW109143136 20201208
- Main IPC: H10D1/68
- IPC: H10D1/68 ; H10D1/00 ; H10D1/66 ; H10D64/01

Abstract:
A method for forming a poly-insulator-poly (PIP) capacitor is disclosed. A semiconductor substrate having a capacitor forming region is provided. A first capacitor dielectric layer is formed on the capacitor forming region. A first poly electrode is formed on the first capacitor dielectric layer. A second capacitor dielectric layer is formed on the first poly electrode. A second poly electrode is formed on the second capacitor dielectric layer. A third poly electrode is formed adjacent to a first sidewall of the second poly electrode. A third capacitor dielectric layer is formed between the third poly electrode and the second poly electrode. A fourth poly electrode is formed adjacent to a second sidewall of the second poly electrode that is opposite to the first sidewall. A fourth capacitor dielectric layer is formed between the fourth poly electrode and the second poly electrode.
Public/Granted literature
- US20220376037A1 METHOD FOR FABRICATING POLY-INSULATOR-POLY CAPACITOR Public/Granted day:2022-11-24
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