Invention Grant
- Patent Title: Sparse piers for three-dimensional memory arrays
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Application No.: US17656280Application Date: 2022-03-24
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Publication No.: US12302766B2Publication Date: 2025-05-13
- Inventor: Stephen W. Russell , Enrico Varesi , David H. Wells , Paolo Fantini , Lorenzo Fratin
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Holland & Hart LLP
- Main IPC: H10B63/10
- IPC: H10B63/10 ; G11C13/00 ; H10B63/00 ; H10D64/01 ; H10N70/00 ; H01L21/02

Abstract:
Methods, systems, and devices for sparse piers for three-dimensional memory arrays are described. A semiconductor device, such as a memory die, may include pier structures formed in contact with features formed from alternating layers of materials deposited over a substrate, which may provide mechanical support for subsequent processing. For example, a memory die may include alternating layers of a first material and a second material, which may be formed into various cross-sectional patterns. In some examples, the alternating layers may be formed into one or more pairs of interleaved comb structures. Pier structures may be formed in contact with the cross sectional patterns to provide mechanical support between instances of the cross-sectional patterns, or between layers of the cross-sectional patterns (e.g., when one or more layers are removed from the cross-sectional patterns), or both.
Public/Granted literature
- US20230309426A1 SPARSE PIERS FOR THREE-DIMENSIONAL MEMORY ARRAYS Public/Granted day:2023-09-28
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