Invention Grant
- Patent Title: Semiconductor device
-
Application No.: US18132527Application Date: 2023-04-10
-
Publication No.: US12317544B2Publication Date: 2025-05-27
- Inventor: Junichi Koezuka , Kenichi Okazaki , Yasuharu Hosaka , Toshimitsu Obonai , Yasutaka Nakazawa , Seiji Yasumoto , Shunpei Yamazaki
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi
- Agency: Robinson Intellectual Property Law Office, P.C.
- Agent Eric J. Robinson
- Priority: JP2018-146787 20180803,JP2018-175352 20180919,JP2018-201126 20181025,JP2019-061174 20190327
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/786 ; H10D30/67 ; H10D86/40 ; H10D86/60 ; H05B33/22 ; H10K50/00

Abstract:
A semiconductor device with favorable electrical characteristics is provided. A highly reliable semiconductor device is provided. A semiconductor device with stable electrical characteristics is provided. A semiconductor device includes a first insulating layer, a second insulating layer, a semiconductor layer, and a first conductive layer. The semiconductor layer, the second insulating layer, and the first conductive layer are stacked in this order over the first insulating layer. The second insulating layer has a stacked-layer structure in which a first insulating film, a second insulating film, and a third insulating film are stacked in this order. The first insulating film, the second insulating film, and the third insulating film each contain an oxide. The first insulating film includes a portion in contact with the semiconductor layer. The semiconductor layer contains indium, gallium, and oxygen and includes a region with an indium content percentage higher than a gallium content percentage.
Public/Granted literature
- US20230317856A1 SEMICONDUCTOR DEVICE Public/Granted day:2023-10-05
Information query
IPC分类: