Invention Grant
- Patent Title: Dual zone heaters for metallic pedestals
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Application No.: US18443906Application Date: 2024-02-16
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Publication No.: US12322617B2Publication Date: 2025-06-03
- Inventor: Sairam Sundaram , Aaron Durbin , Ramesh Chandrasekharan
- Applicant: LAM RESEARCH CORPORATION
- Applicant Address: US CA Fremont
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: US CA Fremont
- Main IPC: H01L21/31
- IPC: H01L21/31 ; H01L21/469 ; H01L21/67 ; H01L21/687
Abstract:
A temperature-controlled substrate support for a substrate processing system includes a substrate support and a controller. The substrate support includes N zones and N resistive heaters, respectively, where N is an integer greater than one, and a temperature sensor located in one of the N zones. The controller is configured to calculate N resistances of the N resistive heaters during operation and adjust power to N−1 of the N resistive heaters during operation of the substrate processing system in response to a temperature measured by the temperature sensor located in the one of the N zones and the N resistances of the N resistive heaters.
Public/Granted literature
- US20240194506A1 DUAL ZONE HEATERS FOR METALLIC PEDESTALS Public/Granted day:2024-06-13
Information query
IPC分类:
