Invention Grant
- Patent Title: Method for forming semiconductor structure and a semiconductor
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Application No.: US17767574Application Date: 2021-08-16
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Publication No.: US12324148B2Publication Date: 2025-06-03
- Inventor: Chih-Cheng Liu
- Applicant: ChangXin Memory Technologies, Inc.
- Applicant Address: CN Hefei
- Assignee: ChangXin Memory Technologies, Inc.
- Current Assignee: ChangXin Memory Technologies, Inc.
- Current Assignee Address: CN Hefei
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: CN202011552783.6 20201224
- International Application: PCT/CN2021/112876 WO 20210816
- International Announcement: WO2022/134623 WO 20220630
- Main IPC: H10B12/00
- IPC: H10B12/00 ; H01L21/768 ; H01L23/522

Abstract:
The embodiments of the present application provide a semiconductor structure manufacturing method for forming a semiconductor structure. The method includes: forming a plurality of discrete transistor structures (102) on a substrate (101); forming a dielectric layer (111) covering the transistor structure (102); forming a plurality of metal lines (103) on the top surface of the dielectric layer (111); forming an opening (105) in the gap between two of the plurality of metal lines (103); the insulation layer (106) fills the opening (105), the dielectric constant of the insulating layer (106) is smaller than the dielectric constant of the dielectric layer, and therefore the insulating layer (106) reduces the parasitic capacitance between the metal lines (103) as well as the parasitic capacitance between the metal lines (103) and the transistor structure (102); this method discloses how to form plurality of metal lines in the chip array area, meanwhile keeping the parasitic capacitance between the formed metal lines and other conductive structures small.
Public/Granted literature
- US20240268104A1 Method For Forming Semiconductor Structure And A Semiconductor Public/Granted day:2024-08-08
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