Invention Grant
- Patent Title: Optical component
-
Application No.: US18187295Application Date: 2023-03-21
-
Publication No.: US12326663B2Publication Date: 2025-06-10
- Inventor: Valentin Jonatan Bolsinger
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102020212367.5 20200930
- Main IPC: G03F7/00
- IPC: G03F7/00

Abstract:
An optical component has a diffraction structure for diffractively influencing a direction of emergence of light of at least one wavelength incident on the optical component. The diffraction structure includes at least two diffraction substructures superimposed in at least one portion of the optical component and having first positive diffraction structures and first negative diffraction structures. A first diffraction substructure has first positive diffraction structures and first negative diffraction structures arranged to have a symmetry following a first symmetry condition. A second diffraction substructure has second positive diffraction structures and second negative diffraction structures arranged to have a second symmetry condition differing from the first symmetry condition. This can result in an optical component for which a production of a diffraction structure with a diffraction effect for different target wavelengths and/or an improved diffraction effect for one and the same target wavelength is made more flexible.
Public/Granted literature
- US20230221648A1 OPTICAL COMPONENT Public/Granted day:2023-07-13
Information query